Product
Optical experimental equipment

Air flotation de-vibration experimental platform

Anti-Vibration Optical Experiment Stage

•Suitable applications: Wafer, IC in tray, Micro/Mini LED panel…

Specification
INFORMATION

 

Maximum size of object to be tested: 240mm(W)* 450mm(L)
Effective scanning stroke: 250mm x 800mm
Platform maximum speed: 500mm/sec
Illumination methods: coaxial, unilateral/bilateral light, fiber optic ring light at various angles, DIC differential interference, etc.
Highest resolution: Linescan 3.5um/20x=0.175um/px; Areascan 2.5um/20x=0.125um/px
Suitable product types: Wafer, COG, PSS, Laser Diode, Glass, conductive particle detection, Micro LED…etc.
Suitable applications: LineScan camera scanning, AreaScan camera high-speed flying shooting (both can be used with autofocus systems)
Services: paid sample testing & optical design (including customization of autofocus system, customization of fiber optic Light Guide)

 

 


 

 

Machine appearance